EBE Series | Electron Beam Lab Unit / Pilot Unit
For material screening, EB formulation R&D, EB pilot validation and production introduction assessment.
Integrated dose-depth prediction helps turn electron beam processing from blind testing into directed validation.
Equipment Highlights
- Self-shielded, plug-and-use in laboratory settings;
- Integrated dose-depth prediction tool to reduce blind testing;
- Hybrid configuration, optional 172 nm excimer module with shared nitrogen chamber.
EBE parameters and pilot lines
| Parameter | Typical Value |
|---|---|
| Accelerating voltage | 80-200 kV (150 / 200 kV selectable by configuration) |
| Sample size | Lab unit: A4 (210 x 297 mm); pilot unit: 400 mm width |
| Sample thickness | Lab unit: < 50 mm |
| Conveying speed | Up to 30 m/min |
| Typical equipment size | W1.8 m x D1.3 m x H1.7 m |
| Optional module | 172 nm excimer module |
Panel Pilot Line
START WITH VALIDATION
Use EBE to Narrow the Validation Direction First
Share material structure, target layer, current process and expected performance. EBC will discuss lab validation, pilot validation and production introduction routes.